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MEMSnet Home: MEMS-Talk: Question about thermal conductive glue for drie
Question about thermal conductive glue for drie
2004-07-08
Han Geun Yu
2004-07-08
BobHendu@aol.com
2004-07-09
Jobert van Eisden
2004-07-10
#GUO XUN#
2004-07-15
Xu Zhu
Question about thermal conductive glue for drie
Han Geun Yu
2004-07-08
Hi, I am struggling with heat problem of substrate while doing drie. Because I
use small piece, I need carrier wafer to do drie and I think it makes heat to
flow little. If you know any glue or greese to increase the heat flow, please
let me know.

Thank you.

Han
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