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MEMSnet Home: MEMS-Talk: ITO Etch
ITO Etch
2004-07-10
Jeff Campbell
ITO Etch
Jeff Campbell
2004-07-10
Hello,
Does anyone know if BOE will etch ITO? If so, what will etch SiO2 but
not ITO?
Also, something that will etch ITO but not Si3N4?

many thanks,
Jeff Campbell

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