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MEMSnet Home: MEMS-Talk: RIE process for Chrome
RIE process for Chrome
2004-07-12
Greg Reimann
2004-07-12
Isaac Wing Tak Chan
2004-07-12
BobHendu@aol.com
RIE process for Chrome
Greg Reimann
2004-07-12
Hi all,

Does anyone have a good RIE recipe for etching chrome?  I have heard
chlorine and oxygen are the way to go, but I don't know anything about
mixture, pressure, or power.

Thanks,
Greg



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