If you expose your titanium (or chromium) to air after deposition before the
copper deposition,
an oxide will form that prevents good adhesion of the copper.
Even if you wet-etched off this oxide, it would be exposed to air before
returning to the vacuum chamber.
You need to deposit the Ti adhesion layer, then as soon as possible, deposit
the copper without breaking vacuum.
    --Kirt Williams

----- Original Message -----
From: "Patrick Poissant" 
To: 
Sent: Tuesday, July 06, 2004 9:24 AM
Subject: [mems-talk] Sticking problem of evaporated copper on titanium


> Hello,
>
> I have sticking problems of my evaporated copper on evaporated titanium.
Does someone had the same problem? solutions? Is it because of the titanium
oxide? How can I remove it if so? Is the adhésion of copper on chromium
better?
>
> Best regards,
>
> Patrick Poissant