I feel it is due to the temperature ramping up and down too fast in
baking. Furthermore, after spin-coating, let SU-8 relax a while would
also improve the quality.

In http://aveclafaux.freeservers.com/SU-8.html, there are some useful
tips to handle SU-8.


-----Original Message-----
From: Amani Salim [mailto:[email protected]]
Sent: Tuesday, July 13, 2004 11:39 PM
To: [email protected]
Subject: [mems-talk] Su-8 craking problem

Dear colleagues,

Any suggestions for avoiding cracking in Su8?
am using the 2100 Su8, and am making 100 microns features and follow
exactly the recipe suggested by microchem, seems like theres still small
cracks at the border of my 10 microns structures,

any suggestions are very helpful,

regards,



Amani Salim
******************************************
Research Assistant
Department of Electrical and Computer Eng.
U of Minnesota,T.C.
UMBM Lab
Office phone: 612 626-0590
Lab phone: 612-626-7188