A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: metal resistance after anodic bonding
Polyimide Wet Etch
2004-07-14
[email protected]
metal resistance after anodic bonding
2004-07-15
Shay Kaplan
2004-07-16
Kirt Williams
metal resistance after anodic bonding
Shay Kaplan
2004-07-15
Hi,
We have been using Cr/Au 1500/2500 evaporated conductors on Pyrex for devices
that are latter anodicaly
bonded.
We have noticed a 10 fold increase in resistance following exposure to 370 deg
for 30 min at nitrogen
ambient.
analysis showed that the chrome only does not change it's resistance.

anybody out there know what is causing this? any idea how to avoid it?
better two metal option?

thanks
shay




reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
MEMS Technology Review
Harrick Plasma, Inc.
The Branford Group