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MEMSnet Home: MEMS-Talk: Sputter target help (mung?)
Sputter target help (mung?)
2004-07-15
Greg Reimann
Sputter target help (mung?)
Greg Reimann
2004-07-15
Hi,

I am dealing with a sputtering system where you need to affix the target
to a copper plate in order to mount it in the system.  However, I need
to be able to swap targets with a system where you don't need to do
that.  Therefore, I need a way to attach and detach the target from this
copper plate.  I know this is possible, because we have some targets
that are fixed with a substance with which you can do that.  Someone
said that the substance was "mung," but no one seems to know what mung
is or where to buy it.

Please let me know if you have any idea what I am talking about.

Greg Reimann
Boston University


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