Marc/Sudhanshu,

You may want to take a look at IntelliSense's MEMaterial for your
Material properties .

It's a comprehensive MEMS database built over the last 12 years and
contains over 70 materials/processes. You can estimate material
properties (for example stresses and youngs modulus) as a function of
the processing parameters (temperature of deposition, RF Power, partial
pressures etc).

You can find a full datasheet at


Best!


> Hi Sudhanshu,
>
> On your first point, unfortunately there is no one definitive source
> for
> material properties in MEMS, and even if there was I'm sure much of it
> would
> be subject to debate, as so many materials used in MEMS are not
> standardized.  I'm afraid you're on your own, but one of the best
> resources
> is the one right here http://www.memsnet.org/material/ .  Other than
> that,
> if there is something in particular that you can't find, you're already
> talking to the right group; just ask.