We've tried a number of etchants for PI 2556, which I will guess is similar.
Piranha worked, but is too fast.
Microstrip 2001 (a commercial photoresist stripper), at 85 C, etched at
about 0.5 um/min.
You would have to use a hard mask such a thin layer of chromium.
    --Kirt Williams

----- Original Message -----
From: 
To: "mems-talk" 
Sent: Wednesday, July 14, 2004 4:19 PM
Subject: [mems-talk] Polyimide Wet Etch


> Could anyone give me a recipe for wet etching polyimide (PI2555)? I tried
several ways but nor worked.
>
> Thanks
> - ware.
>
>
>
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