A technique I've used to overcome poor adhesion of photoresist to Pyrex
is to first put down a layer of chrome. This is kind of a brute force
last alternative if HMDS prime doesn't give adequate adhesion.

Roger Shile

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Lee, Duhyun
Sent: Friday, July 16, 2004 5:58 AM
To: [email protected]
Subject: [mems-talk] AZ1512 adhesion on quartz wafer

Dear MEMS talkers,

I'm trying to pattern 5um-width lines with AZ1512 and lift-off process
on the quratz wafer.
But the resist dose not have good adhesion.

What factors do I have to consider and how can I handle those factors?

pre-cleaning? baking? or...



Lee, Duhyun

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[email protected]
Technology Innovation Center(TIC)
Dep. of Advanced Materials Eng.
Sungkyunkwan University, KOREA
Tel +82-31-290-5645
Fax +82-31-290-5644
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