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MEMSnet Home: MEMS-Talk: Re: Selective etchant
Re: Selective etchant
1998-11-16
Armin Kuebelbeck
1998-11-16
Eric Bonnotte
Re: Selective etchant
Armin Kuebelbeck
1998-11-16
Hi,

I guess diluted HF would etch the SiO properly and will not attack the
Chromium.

Best regards

Armin

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