Hi Stephan

Xenon difluoride might etch your Ti and will not touch the Al at all (The etch
rate of Ti in XeF2 is very variable and depends a great deal on how it is
deposited). However, it does etch Si much faster than Ti. Is the Si in your
project exposed? If the Si is not exposed give me a call an I could set up a
test.

David Springer
XACTIX, Inc.
2403 Sidney St.
Suite 265
Pittsburgh, PA 15203
+1 412 381 3195
[email protected]
www.xactix.com


>>  Hey there,

 >>  I have a 2µm thick layer of structured Aluminum on top of a Si-wafer. On
>>  top of the Aluminum there is about 20-30nm of Titanium.

 >>  1. Does anyone know how to (chemically?) remove the Titanium without
 >>  chaning the size of the Aluminium structures within less than 1µm?
 >>  2. I read that the conductivity of sputtered Aluminum can be enhanced by
 >>  tempering it. Does anyone know some figures how much the conductivity
 >>  changes?

 >>  Bes regards,

 >>  Stephan
 >>  _______________________________________________
 >>  [email protected] mailing list: to unsubscribe or change your list
 >>  options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
 >>  Hosted by the MEMS Exchange, providers of MEMS processing services.
 >>  Visit us at http://www.memsnet.org/