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MEMSnet Home: MEMS-Talk: Intellisense Doubt :)
AlN dry etching
2004-07-19
Yeswanth Rao
2004-07-20
William Lanford-Crick
2004-07-20
Kamal Yadav
Intellisense Doubt :)
2004-07-20
Sudhanshu Garg
Backside Oxidation remove for DRIE
2004-07-21
Z.,W.Y.(Lydia)
2004-07-21
olivier.millet@delfmems.com
Intellisense Doubt :)
Sudhanshu Garg
2004-07-20
Hi,

I want to implant phosphorous in boron implanted silicon (p type).
Intellisense doesn't seem to allow implantation on a pre-implanted
material. I can't even etch the latter. I don't want to go the long way by
adding a mask and making pits. Any way out ?

(seems there are roadblocks just everywhere you go!)

thanks,
Sudhanshu
India

~*~

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