Hi, all,

We need transfer pattern on gray level photoresist into germanium. Some
reference mentioned to use H2O2 for germanium wet etching. What I need find out
is an etchant for BOTH gray level photoresist AND germanium. You advice on
which photoresist is well suited for gray level application will also be highy
appreciated. As to photoresist film thickness, it depends on the etch rate
between photoresist and germanium substrate. Can anyone provide any help? Thank
you very much.

Best regard,
Sincerely,
Zhiqiang Liu

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Zhiqiang Liu
University of Miami
1251 Memorial Dr, #EB 406
Coral Gables, FL, 33146
Tel: 305-284-5918