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MEMSnet Home: MEMS-Talk: query regarding bonding.
query regarding bonding.
2004-07-21
vishal shenoy
query regarding bonding.
vishal shenoy
2004-07-21
hi
could anybody suggest me on the best way to bond (both
permanently and semi-permanently) glass or perspex or
both over 107 microns thick polymer layer with a
channel running across. the bonding should not affect
channel as well as the polymer. this glass or persepex
has got an inlet and outlet holes of 1 to 2 mm
diameter. the polymer consists of 5 microns thick UV15
layer over a 2 microns thick SU8 layer, which is again
over a 100 microns thick UV15 layer.
thanks a lot.
Vishal Shenoy,
RMIT University,
Melbourne.





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