Ralph,

Dow Corning silicone grease is the most difficult of all greases to get off.
Acetone will not do
it.
Trichloroethylene or a produce call Opti-Clear (a trichlor alternative) should
do the trick.

Good Luck!

Brent

Ralph Hinkley wrote:

> Dear MEMS colleagues,
>
> I'm having difficulties removing the high vacuum grease.
> High vacuum grease is used in attaching small samples to a dummy wafer for Si
deep etch process.
> After the deep etch process, I managed to detach the samples in acetone,
> but totally removing the grease with acetone seems impossible.
> Can anyone shed some light on?
> I'm using Dow corning high vacuum grease.
>
> Regards.
>
> Ji.
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