Tracy,

How are you putting your thin teflon films down?  We have a
plasma process we do that gives good adhesion.

David
ACT MicroDevices, Inc.


Tracy E. Bell wrote:

> Can anyone suggest a method for improving
> the adhesion of thin Teflon films to silicon
> and/or oxide?
>
> Thanks in advance,
>
> Tracy Bell
> University of Michigan
>



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