We use toluene or a straight-chain alkane, like heptane.

Chris

On Thursday, July 22, 2004, at 07:47  am, Ralph Hinkley wrote:

> Dear MEMS colleagues,
>
> I'm having difficulties removing the high vacuum grease.
> High vacuum grease is used in attaching small samples to a dummy wafer
> for Si deep etch process.
> After the deep etch process, I managed to detach the samples in
> acetone,
> but totally removing the grease with acetone seems impossible.
> Can anyone shed some light on?
> I'm using Dow corning high vacuum grease.
>
> Regards.
>
> Ji.
--
Christopher F. Blanford
Inorganic Chemistry Laboratory, South Parks Road, Oxford, OX1 3QR, UK
Phone: +44 (0)1865 282603; Fax: +44 (0)1865 272690
PGP keyID: 8D830BC9  http://pgp.mit.edu/