I have used Fomblin grease to attach wafers to the electrode during RIE.
I then used Fomblin solvent to effectively remove the grease.  I chose
the Fomblin grease for its inert nature.  You might contact Dow Corning
for advice on appropriate solvents for their grease.

Roger Shile

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Ralph Hinkley
Sent: Wednesday, July 21, 2004 11:47 PM
To: [email protected]
Subject: [mems-talk] HIgh vacuum grease removal


Dear MEMS colleagues,

I'm having difficulties removing the high vacuum grease.
High vacuum grease is used in attaching small samples to a dummy wafer
for Si deep etch process.
After the deep etch process, I managed to detach the samples in acetone,
but totally removing the grease with acetone seems impossible.
Can anyone shed some light on?
I'm using Dow corning high vacuum grease.

Regards.

Ji.
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