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MEMSnet Home: MEMS-Talk: Alternative developer for AZ9260
Alternative developer for AZ9260
2004-07-23
Vijay
Alternative developer for AZ9260
Vijay
2004-07-23
Hi !!
I used a AZ300 MIF developer for the AZ9260. It seems to work pretty
well. I used it for 3.5 minutes for a 10 micron thickness photo resist.
Hope this helps.
Vijay

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