Dear Vishal:

We've developed a micromachined convective tilt sensor in CMOS.  We had a
poster paper at the last Hilton Head conferemce and a presentation paper
in the ASME meeting in Anaheim CA Nov 15-20, "Convection-Based Accelerometer
and Tilt Sensor Implemented in Standard CMOS."  Contact me if you wish
more information.

Michael Gaitan

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Michael Gaitan, Ph.D.
Project Leader, MicroElectroEmchanical Systems
Semiconductor Electronics Division
NIST 225/B360
Gaithersburg MD 20899