aqua regia can etch Pt but not sure if the resist can survive. As your
description, why not using liftoff.

Good luck,

Hongjun Zeng, PhD
Microfabrication Application Laboratory (MAL)
University of Illinois at Chicago
3014 ERF Building, 842 W. Taylor Street
Chicago, IL 60607
Tel. 312-413-5889, Fax: 312-996-6465


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Imran Ghauri
Sent: Monday, July 26, 2004 1:35 PM
To: [email protected]
Subject: [mems-talk] Platinum etch

Hi,

Can anyone help me in finding

1) the best recipe for the wet etch for Platinum which
can stand standard  photoresist (AZ 4330).

2)Also, I want to create some rectangular shape
(1mmx1mm) cavities of about 20 microns deep. Can
anyone help me in this regard too. I've on my one
wafer devices with metal combinations Pt/Ti and on
other wafer devices Pt/Cr and third wafer with Ti/Cr.
Will it be feasible to create cavities before or after
fab process. Any suggestions will be appreciated.

imran
[email protected]
Grad Student




__________________________________
Do you Yahoo!?
New and Improved Yahoo! Mail - 100MB free storage!
http://promotions.yahoo.com/new_mail
_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/