Imran Aqua regen etching is the only wet etch that will work on Pt.The only
problem is there is no resist out that will hold up to the wet etch.There
are two other options RIE etch with Argon vary slow etch or RIE etch with
Clarion/Argon vary fast etch rate,you must use SIO2 mask for both
applications.

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Imran Ghauri
Sent: Monday, July 26, 2004 2:35 PM
To: [email protected]
Subject: [mems-talk] Platinum etch [Spam?]


Hi,

Can anyone help me in finding

1) the best recipe for the wet etch for Platinum which
can stand standard  photoresist (AZ 4330).

2)Also, I want to create some rectangular shape
(1mmx1mm) cavities of about 20 microns deep. Can
anyone help me in this regard too. I've on my one
wafer devices with metal combinations Pt/Ti and on
other wafer devices Pt/Cr and third wafer with Ti/Cr.
Will it be feasible to create cavities before or after
fab process. Any suggestions will be appreciated.

imran
[email protected]
Grad Student




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