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MEMSnet Home: MEMS-Talk: cross linking PMMA
cross linking PMMA
2004-07-27
Bill Rippard
2004-07-28
Jian WEI
cross linking PMMA
Bill Rippard
2004-07-27
I was wondering if anyone had information about crosslinking/hardening PMMA
using UV light?  At high doses from an e-beam PMMA will turn into a
negative resist instead of a positive one that won't strip off in
acetone.  I was trying to do the same thing with UV light.  I have been
told this is possible but can't find any details.  Thanks for the help.

Thanks.
Bill



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