If you just need the resolution of UV light, why bother use e-beam?
You can use Remover PG from microchem to remove the cross-linked PMMA.

Jian

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]On
Behalf Of Bill Rippard
Sent: Tuesday, July 27, 2004 5:36 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] cross linking PMMA


I was wondering if anyone had information about crosslinking/hardening PMMA
using UV light?  At high doses from an e-beam PMMA will turn into a
negative resist instead of a positive one that won't strip off in
acetone.  I was trying to do the same thing with UV light.  I have been
told this is possible but can't find any details.  Thanks for the help.

Thanks.
Bill


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