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MEMSnet Home: MEMS-Talk: Etch SiO2 while protecting ZnO nanowires from being etched
Etch SiO2 while protecting ZnO nanowires from being etched
2004-08-04
Yong Sun
Etch SiO2 while protecting ZnO nanowires from being etched
Yong Sun
2004-08-04
Hi, there:
      I was trying to find some etchant to etch SiO2 while protecting my ZnO
nanowires. Does anybody know how to do this ? I once read a message talking
about etch ZnO films while protecting SiO2, which is quite the opposite of my
objection.
      What I plan to do is to disperse some ZnO nanowires on the SiO2 surface,
and to etch a small well underneath the nanowires afterwards.
     I won't mind to use Dry Etch or Wet Etch, as long as the etchant won't etch
ZnO nanowires, it's fair enough for me. Any suggestions are welcome, thanks
Best wishes
Yong Sun

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