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MEMSnet Home: MEMS-Talk: Literature on circular/rectangular Electrostatic actuator
Literature on circular/rectangular Electrostatic actuator
2004-08-10
Sandeep Makhar
Literature on circular/rectangular Electrostatic actuator
Sandeep Makhar
2004-08-10
Hi all,

Is there any literature available on, deformation of a circular/rectangular
plate/membrane under an electrostatic force. Kindly let me know if there is any
available.

Thanks,
Sandeep


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