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MEMSnet Home: MEMS-Talk: doped pieces of Si
doped pieces of Si
2004-08-09
Sarah C Mcquaide
2004-08-10
Sudhanshu Garg
2004-08-10
Brent Garber (2 parts)
Driver Circuit board for TP85-LCP1N pin detector; Reply to me only
2004-08-10
Kamal Yadav
2004-08-11
David Nemeth
2004-08-11
Neal Ricks
doped pieces of Si
Neal Ricks
2004-08-11
Silicon wafers are doped during the solidification phase of the boule
manufacturing process.  In other words, the concentration of dopant is a bulk
propery of the Si throughout the wafer thickness.  So yes, you can grind up
doped wafers and get doped particles.  Alternatively, you can buy highly doped
silicon powder from suppliers to the wafer foundry industry.

Neal Ricks
Nanofabrication Lab Manager
Florida International University

Sarah C Mcquaide  wrote:



Does anybody know whether anyone manufactures Si wafers that are p- and n-type
doped completely through the total thinkness of the wafer? The thickness of the
wafer does not matter to me; I need to make small (micron-sized) dopes Si
"powder", and thus would like to buy pre-doped wafers to grind up.
Alternatively, has anyone heard of doping micron-sized Si pieces in a furnace,
and whether there are any problems with doing this?

Thanks!
Sarah McQuaide
Research Engineer
University of Washington Genomation Lab

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