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MEMSnet Home: MEMS-Talk: working without clean room
working without clean room
2004-08-23
augusto einsfeldt
2004-08-24
Patrick Roman
working without clean room
augusto einsfeldt
2004-08-23
Have anyone worked on building an integrated circuit or a MEMS without using
a complete clean room for all processes (just a clean process in a filtered
air positive pressure room)?



Of course the yield may be very low since many dust particles will drop into
wafer's surface but I wonder if it will remain high enough to allow process
technology test and development (not production).



The porpouse of this question is to build argumentation in a discussion
regarding potential positive results when building a very low cost facility
for first steps in microelectronics' process technology development and
training.

Thanks in advance,



Augusto Einsfeldt






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