Augusto-

Your chances of good results are very high.  Standard cleanroom industry
HEPA filtered flow hoods meet (ISO 5) performance in standrad laboratories.
The next step is to design your process to limit contamination issues.
Contact me directly if you have questions or comments.

Regards,

--
Patrick Roman, M.S.
Microsystems Engineer
Code 553- Detector Systems Branch
Room E042 Building 11
NASA/ Goddard Space Flight Center
Greenbelt,MD 20771
phone: (301) 286-3558
fax: (301) 286-1672
mobile: (202) 294-8602
email: [email protected]



-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of augusto einsfeldt
Sent: Monday, August 23, 2004 12:43 PM
To: [email protected]
Subject: [mems-talk] working without clean room


Have anyone worked on building an integrated circuit or a MEMS without using
a complete clean room for all processes (just a clean process in a filtered
air positive pressure room)?



Of course the yield may be very low since many dust particles will drop into
wafer's surface but I wonder if it will remain high enough to allow process
technology test and development (not production).



The porpouse of this question is to build argumentation in a discussion
regarding potential positive results when building a very low cost facility
for first steps in microelectronics' process technology development and
training.

Thanks in advance,



Augusto Einsfeldt





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