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MEMSnet Home: MEMS-Talk: SNR negative e-beam resist wanted
SNR negative e-beam resist wanted
2004-08-25
[email protected]
SNR negative e-beam resist wanted
[email protected]
2004-08-25
Dear MEMS-talk users

Our group has used SNR negative e-beam resist in the past, but do not have
have it anymore.
Does anyone have some quantity we can buy, or know where we could try to
get it.
We used SNR M2-type (or M4-type) in xylene, fabricated by TOSOH corp
(toyobeam).

Alternatively, who has a good alternative negative e-beam resist for lift
off purposes?
(With good resolution, controlled undercut and preferably easily removed)

Please reply to me only so that the group is not inconvenienced.
Thanks in anticipation, kind regards,

Gerard ten Berge
MAPPER Lithography
[email protected]



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