A number of questions about etching ITO.  Why not lift off which is easy?  Bill
Moffat

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Shelegeda Evgeny
Sent: Tuesday, August 31, 2004 6:41 AM
To: [email protected]
Subject: [mems-talk] ITO etchat wich is selective to Aluminium


I need to etch ITO thin films in a photolithography process of
fabricating a semiconductor device.

The main task of this photolithography process is to etch ITO film but
not to etch an Al film which is under the ITO film.
So I need the ITO etchant which is highly selective to Al.


Best regards,
Shelegeda Eugenie
Research Assistant
P.N. Lebedev Physical Institute
Moscow, Russia

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