Hi.
You may want to contact Mr. Michael Boyle at Bontronix in America.
925-947-2664 (fax/tel)
They may be able to help you with the spec.
Good luck.

-Y.K.

Adam Cohen wrote:

> Dear Colleagues,
>
> We are seeking a source for a small quantity of SOI wafers with a Si
> thickness of about 50 microns for deep silicon RIE. We would prefer 4"
> diameter wafers, but other sizes may be acceptable. Substrate/overall
> thickness should be as large as possible.
>
> As an alternative to these, we are considering bonding a 50-micron Si wafer
> to glass. Does anyone know good sources for thin wafers and flat glass
> substrates, and someone who can do the bonding?
>
> If anyone has any leads, we'd much appreciate it.
>
> Thanks very much,
>
> Adam Cohen
> University of S. California
>