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MEMSnet Home: MEMS-Talk: The color of poly or amorphous silicon deposited PECVD
The color of poly or amorphous silicon deposited PECVD
2004-09-02
Sarfaraz Moh
The color of poly or amorphous silicon deposited PECVD
Sarfaraz Moh
2004-09-02
Dear Jinkee

The colour might be due to the thickness as there is
N2 in the chamber there might be N2 in the film.

Why dont you analyse the film using Ellipsometry,
SEM-EDS or XPS. If you have the facility.

Thanks
Sarfaraz Moh
Thin film centre
University of Paisley
UK





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