I agree. For optimal results always use the same manufacturer's
developer as is the resist. Clariant is making AZ resists and
developers. I am not familiar of AZ 351, but Microposit MF 351 developer
concentrate should work very well on 1813 (I only have experience with
1818 and 1811, but they are from the same 1800 PR group, just different
thickness)



-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Robert Black
Sent: Thursday, September 02, 2004 4:25 PM
To: 'General MEMS discussion'
Subject: RE: [mems-talk] MF 351 or AZ 351


Did you word this correctly. I think Shiply makes Microposit MF and
Hoechst (also known as AZ) makes the AZ 351.
   Basically the only difference in developers is the surfact used, and
concentration of TMAOH. I would use the Shiply developer on the Shiply
resist. In my opinon, the best developer for Shiply 1813 is Shiply MF
319.



Hi all,

I would like to know what is the difference between Microposit MF 351
and Shipley AZ 351. The target photoresist is Shipley 1813.

Thank you all in advance.

Joolien


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