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MEMSnet Home: MEMS-Talk: Can PMMA form 30nm thin film on Si substrate?
Can PMMA form 30nm thin film on Si substrate?
2004-09-03
Z. Jiang
2004-09-03
Yilei Zhang
Can PMMA form 30nm thin film on Si substrate?
Z. Jiang
2004-09-03
HI,

  I am looking for a way to produce a thin layer of 30nm uniform PMMA on Si
substrate. Does anyone have the experience?
        jiang



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