A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Can PMMA form 30nm thin film on Si substrate?
Can PMMA form 30nm thin film on Si substrate?
2004-09-03
Z. Jiang
2004-09-03
Yilei Zhang
Can PMMA form 30nm thin film on Si substrate?
Yilei Zhang
2004-09-03
Hi  jiang:
you may like to dilute the PMMA and try different spin speed and time.
Microchem has a list of coating thickness VS spin speed and time. that can be
a good start point.



Regards,
Yilei Zhang








reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
The Branford Group
MEMS Technology Review
Addison Engineering