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MEMSnet Home: MEMS-Talk: Sticking problem of evaporated copper on titanium
Sticking problem of evaporated copper on titanium
2004-09-07
B. Sivagnanam
2004-09-07
Kirt Williams
Sticking problem of evaporated copper on titanium
B. Sivagnanam
2004-09-07
Dear Mr Williams,

I am Siva from Advanpack Solutions Pte Ltd., Singapore.

I need to know what are the factors that affect adhesion between Sputtered
Ti and Sputterd Cu. Ti and Cu are sputtered in sequence without breaking the
vacuum.

Regards,

Siva
AdvanPack Solutions Pte Ltd.,
2,Woodlands sector 1
#05-33
Singapore 738 068
DID 65- 6550 3226
Fax 65- 6555 5838
e-mail : [email protected]
www.advanpack.com

This transmission contains information belonging to Advanpack Solutions Pte
Ltd, and may be confidential and/or legally privileged. The information is
intended for the use of the individual or entity named on the document. If
you are not the intended recipient you are hereby notified that disclosing,
distributing or copying this information is strictly prohibited. If you have
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