Dear Colleague,

here is the address of a company producing and selling small quantities of SOI-
Wafers to your specifications:

SICO Meiningen Wafer GmbH
Jerusalemer Str. 13
D-98617 Meiningen
Tel: (0049) 03693 - 71313
Fax: (0049) 03693 - 71315
email: sicomei@t-online.de

As far as I know, 4" is their standard diameter. It should also be possible to
obtain 50 ?m silicon on a glass substrate from SICO.

Cheers,

Ralf G. Longwitz
CiS Institute of Microsensors, Erfurt


Dear Colleagues,

We are seeking a source for a small quantity of SOI wafers with a Si
thickness of about 50 microns for deep silicon RIE. We would prefer 4"
diameter wafers, but other sizes may be acceptable. Substrate/overall
thickness should be as large as possible.

As an alternative to these, we are considering bonding a 50-micron Si wafer
to glass. Does anyone know good sources for thin wafers and flat glass
substrates, and someone who can do the bonding?

If anyone has any leads, we'd much appreciate it.

Thanks very much,

Adam Cohen
University of S. California