Hi,

Copper electroplating is controlled via Cyclic Voltammetric Stripping (CVS).

An article by Intel, describes several equations, and applications of CVS to
fine feature plating (down to sub-60nm features!!!)
http://www.ecitechnology.com/articles
/Charaterization_and_Control_of_Cu_Electroplating_Chemistries_for_On-
chip_Metallization.pdf
(be patient, 5MB file)

If you have any other questions regarding plating, please let me know.

GL,
Ilan Gluzman



-----Original Message-----
From: shruthika prasanna [mailto:[email protected]]
Sent: Tuesday, September 07, 2004 3:04 AM
To: [email protected]
Subject: [mems-talk] Non-cyanide Copper electroplating


Hi All,

I am looking for equations and formulae that can explain non-cyanide
electroplating of copper. Can someone help with textbooks/papers/links for the
same?

Thank you in advance.

Regards,
Shruthika


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