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MEMSnet Home: MEMS-Talk: unwanted tapering of SU-8 structures
unwanted tapering of SU-8 structures
2004-09-08
suscarl
2004-09-08
Patrick Poissant
2004-09-09
Jeff Babinski
unwanted tapering of SU-8 structures
suscarl
2004-09-08
Need advice from SU-8 experts:
I have 30um width by 55um height SU-8 2035 lines. Somehow, after 35s exposure
time and post-bake of 95oC for 20min, the resulting structures are tapered with
bottom 60um width and top 40um width. Can anyone offer possible solutions to
troubleshoot the problem?

Thanks!!

reply
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