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MEMSnet Home: MEMS-Talk: mems-talk-High temperature resistant wax
High temperature resistant wax
2004-09-08
Martyna Trybik
mems-talk-High temperature resistant wax
2004-09-08
Carlo Webster
2004-09-26
Krasniansky Vladimir
2004-09-27
David Henriks
mems-talk-High temperature resistant wax
Carlo Webster
2004-09-08
Dear Martyna,
             Brewer Science has a material called ProTEK which should work
for your application. It is specifically designed for front side protection
during back side V-Groove applications in KOH, HF and MAE.

Please view the following website for more detailed information:

http://www.brewerscience.com/sm/sm_tech_info.html

Best Regards

Carlo Webster
Brewer Science Europe





> Hi all,
>
> Does anyone know any kind of wax or other kind of chemical that would stay
> hard in 100*C ? I used black wax: Crystalbond 590 produced by AREMCO, but it
> is getting soft at 100*C.
> I need it for covering back side of the sample while etching front side with
> TMAH. Every wax that I used, simply melt at temperature above 80-90*C.
>
> Thanks for any advice,
> Martyna Grydlik
>
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