Hi, I have worked with SU8 50 on pyrex wafers without changes from the recipe I
use for Si and achieved good results. Remember doing a proper dehidratation step
of the wafer (30' 200ºC and 4' cooling works fine for me) before SU8 spinning.

Good luck,

Pablo.

Pablo de la Fuente Prado
[email protected]
CEIT, Sección de Microelectrónica.
Paseo de Manuel Lardizábal, 15.
20018 San Sebastián, Spain
Tel.: (34) 943 212 800
Fax.: (34) 943 213 076


-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Krishna Vummidi
Sent: 08 September 2004 18:32
To: [email protected]
Subject: [mems-talk] SU-8 processing on glass


Hi,
I'm an a look out for SU-8 (2025) processing of normal glass slides. Would
appreciate if anyone has processing tips, suggestions and variaitons in recipe
from that of Si (given by micro-chem). thanks, krishna
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