Hello Sudheer,
Here is a link to Petersen's groundbreaking paper:
http://arri.uta.edu/acs/jmireles/MEMSclass/Petersen_Si_as_a_Mechanical_Material.
pdf

regards
samir

On Sun, 12 Sep 2004 03:45:17 +0530, Sudheer S S  wrote:

> I needed the paper by Kurt E. Petersen - "Silicon as a mechanical material".
> Could anyone give me the link, or send the file across. My email is :
> [email protected] or [email protected].