Alain, the ti sticks because even in a vacuum it picks up whatever Oxygen
and water vapor around oxidizes to a ceramic and bonds voila, for the same
reason the metals dont want to stick to it.  It might help, although I am
not at all sure, if you deposited TiN reactively, and then tried to stick
your metals to that.  TiN when deposited properly looks exactly like gold,
if not in proper chemistry is slightly green, also you should measure its
conductivity specific to TiN.  Gary

Gary Hillman
Service Support Specialties, Inc.
9 Mars Court
PO Box 365
Montville, NJ 07045
973-263-0640
973-263-8888.



-----Original Message-----
From:   Alain [SMTP:[email protected]]
Sent:   Tuesday, September 14, 2004 11:09 AM
To:     [email protected]
Subject:        [mems-talk] Sputtering titanium on ceramic

Hi all
Has anyone sputtered titanium on a ceramic type material (we are using
Macor)? We have had good adhesion of titanium on ceramic but when other
layers are added (cu and nickel in that order), it peels off. Any
literature on a similar process anyone knows of or has experience with?
Thanks
Alain

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