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MEMSnet Home: MEMS-Talk: Pore size variation in porous silicon
Pore size variation in porous silicon
2004-09-16
nga
Pore size variation in porous silicon
nga
2004-09-16
Dear all,
Does anybody know how to make p type porous silicon layer with different
pore size. I just wonder which parameter will influence the pore size:
current density or the concentration of HF solution. Your ideas are
appriciated.
Thanks.
Regards,
Nga Pham


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