We've used diluted NaOH at room temperature. The etch is rather slow,
but if it's heated it will start to etch the ITO as well. AZ 300
developer also works rather well. There are also commercial etchants
available selective to ITO.

-Jeff Campbell


Eugenie Shelegeda wrote:

>Dear all.
>
>Does anyone know an ITO wet/dry etchant which is selective to Al.
>
>Does anyone know more wet ITO etchants.
>I know only these:(
>
>1HCl : 1H2O, rate = 0.8 nm/sec
>1HF : 1H2O2 : 10H2O,  rate = 12.5 nm/sec
>
>Best regards,
>Eugenie Shelegeda.
>
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