A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Etched pit on Si Wafer
Etched pit on Si Wafer
1998-12-01
N K Choudhary (97307404)
Etched pit on Si Wafer
N K Choudhary (97307404)
1998-12-01
Hello folks
        I am trying to fabricate an acceleration sensor. I intend to use
force balance feed back to maintain constant tunneling current thus
avoiding any non-linearity. Force balance electrode will be in a shallow
pit of about 1000 to 1500 A.
        My doubt is, after etching the pit and subsequently on removal of
masking oxide will the pit and allignment marks be so visible so as to
allign the next mask? Any suggestion is wellcome.
        Thanking you guys in advance.
regards
choudhary


******************************************************************************
Sqr Ldr N K Choudhary                         Residential Address.
M.Tech (II).Electrical Engg.                  Flat No 304, DRDO Bldg
Microelectronics.                             IIT POWAI
IIT Powai.
Bombay- 400 076.
Tel:  578 3655                                Bombay- 400 076.
email:  
******************************************************************************


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
MEMStaff Inc.
The Branford Group
Nano-Master, Inc.