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MEMSnet Home: MEMS-Talk: Problem with higher rate chromium ebeam deposition
Problem with higher rate chromium ebeam deposition
2004-09-20
#HO CHARLES KIN FAI#
2004-09-21
Jeff Simkins [simkinjr]
Problem with higher rate chromium ebeam deposition
Jeff Simkins [simkinjr]
2004-09-21
Charles,

Is it a multi-pocket gun? Do you see any fluctuations in pressure when
changing metals? You could have a gun cooling water leak. I would expect
some initial out-gassing from heating the source, but not an increase in
pressure during deposition of chromium.

Jeff


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