Natacha,

for holders and handling devices go to "http://www.wafercare.com/".  This is the
Entegris wafer handling product guide (Entegris acquired Fluoroware and Empak
some time back).  You should be able to find something in baskets or chip
holders that will simplify your process handling.

> ----------
> From:         [email protected] on behalf of natacha smetana
> Reply To:     General MEMS discussion
> Sent:         Tuesday, September 21, 2004 1:12 PM
> To:   [email protected]
> Subject:      [mems-talk] Lithography for dummy's
>
> Hi all
> We have just started to use optical lithography to deposit aluminium
structures either by chemical etching or lift-off.
> Since we are new in this business, I have a few basic questions concerning the
art of lithography :
> - Up to now, we use tweezers to hold samples in the different liquids
(developer, water, aluminium etchant, acids...). We would prefer to work with
sample holders to let the sample in the liquid without having to old it and to
process several samples in parallel. The problem is we work with small pieces of
wafer of different size (from 7*7mm2 to quaters of 2 inch wafers) and all the
samples holders I can found are designed for a specified size of wafer. Do you
know any manufacturer who sells the kind of sample holder I need? If I have to
manufacture them by myself, could you suggest any material and convenient
design?
> - We use 4 inch masks. What is the best way to simply clean them?
> - I have a lot of stupid questions concerning lithography (how to put the
resist from the bottle to the sample (syringe, pipette...)? Is it better to put
the resist on the rotating sample? Is it better to develop the sample statiquely
or to stir it?....).
>  Is there a book or a web site which can answer this kind of very basic and
practical questions ?
> Thanks
> Natacha
>
>
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